Ito Conducting Glass Coating Equipment
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1. Vacuum room: Made if stainless steel, upright, the outwall connects cooling water, the inter wall is equipped with stainless steel baffle.
2. Vacuum system: Can choose diffusion pump system or turbo molecular pump system.
3. Evaporator source: Direct current magnetic control sputtering target, interm ediate frequency magnetic control sputtering target, which are respectively fixed on bothsiedes of vacuum room.
4. Workpiece drying system: Adopts stainless steel tubular heater and soaking plate to assure the heating homogeneity of the substrate.
5. Air inflating system: Gas quality flow meter and pressure automatic director.
6. Electrical control system: Touch screen and PLC control automatically, achieve data display, operation and control of the system through interactive mode.
7. Water cooling system: Cool vacuum room and cathode, there are water pressure protection switch and water flow switch.